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Harm removal equipment Product List

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PFC/PFN Removal Device "Clean S PF/PFN"

Decontamination of PFC, SF6, and NF3 at low temperatures below 600°C and with a decomposition rate of over 99%.

The PFC・PFN destruction device "Clean S PF・PFN" treats PFC, SF6, and NF3 at low temperatures (below 600°C) with a high decomposition rate (over 99%). Since the fluorine is fixed as a compound, no further treatment of the fluorine is necessary in subsequent stages. It features an easy-to-handle destruction column (reactor) exchange method, and the utilities required for destruction are only electricity, air, and nitrogen.

  • Gas recovery/treatment equipment
  • Harm removal equipment

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EOG Pest Control Device [EOCS Series] [For the Pharmaceutical Manufacturing Industry]

The EOG gas emitted from the EOG sterilization equipment can be rendered harmless to a concentration of 1 ppm or less. It is an exhaust gas treatment device that achieves both high removal efficiency and energy savings.

This is an exhaust gas treatment device designed to neutralize ethylene oxide gas (hereinafter referred to as EOG) and release it into the atmosphere. 【Features of the EOCS Series】 ◇ High removal efficiency - Capable of reducing EOG concentration to below 1 ppm. ◇ Energy-saving - Achieves energy savings by partially recirculating high-temperature treated exhaust gas. - Eco-operation system that appropriately controls a specially designed burner. ◇ Excellent safety - Ensures safety through various interlocks and multiple safety monitoring systems. ◇ Ease of use - Simple operation with standard combustion safety equipment and temperature control devices. - Automatic operation possible via signals from the sterilizer. ◇ Diverse combinations - Simultaneous treatment of gases including EOG from not only sterilization devices but also aeration chambers and local exhaust systems is possible with a single "EOCS" unit. ◇ High design flexibility - Heat sources can be electric or gas combustion. - Treatment capacity can be designed from a minimum of 0.1 m³/min. * We also offer a "catalytic exhaust gas recirculation type" that aims for low cost by not using a heat exchanger while partially recirculating exhaust gas for energy-saving purposes.

  • EOCS04PS.png
  • EOCS01PSS.png
  • Sterilizer
  • Industrial Furnace
  • Electric furnace
  • Harm removal equipment

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